Biira, Saphina; Hlatshwayo, Thulani T.; Crouse, Philip L.; Bissett, Hertzog; Thabethe, Thabsile T.; Mlambo, Mbuso; Malherbe, Johan B.
(Busitema University ; Springer, 2019-04)
ZrC layers were deposited from ZrCl4–Ar–CH4–H2 gas mixture in a home-built vertical wall chemical vapour deposition system within the deposition time range 0.5–2.5 h. The flow behaviour of ZrCl4 from the static vaporiser ...