Biira, Saphina; Crousec, P. L.; Bissettd, H.; Hlatshwayoa, T. T.; Njoroge, E.G.; Neld, J. T.; Ntsoaned, T. P.; Malherbe, J.B.
(Elsevier, 2017-04-21)
ZrC layers were deposited in a chemical vapour deposition (CVD) reactor on graphite substrates using a ZrCl4- Ar-CH4-H2 precursor mixture. The deposition was conducted at different ZrCl4 partial pressures at a constant ...