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Effect of temperature and CH4/ZrCl4 molar ratio on ZrC layers deposited in a vertical-wall CVD system
Biira, Saphina
;
Alawad
;
Bissett, H
;
Nel, J. T
;
Hlatshwayo, T. T
;
Crouse, P. L
;
Malherbe, J. B
(
Busitema University ; SA Institute of Physics
,
2016
)
CVD growth of ZrC layers at different temperatures.
Alawad, BAB
;
Biira, Saphina
;
Bissett, H
;
Nel, J. T
;
Hlatshwayo, T. T
;
Crouse, P. L
;
Malherbe, J. B
(
Busitema University ; SciEP
,
2016
)
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Author
Biira, Saphina (2)
Bissett, H (2)
Crouse, P. L (2)
Hlatshwayo, T. T (2)
Malherbe, J. B (2)
Nel, J. T (2)
Alawad (1)
Alawad, BAB (1)
Subject
Chemical vapour deposition (2)
Argon (1)
Atmospheric pressure (1)
CH4/ZrCl4 (1)
SEM (1)
Synthesis of ZrC (1)
Temperature (1)
Vertical-wall CVD system (1)
XRD (1)
ZrC (1)
... View More
Date Issued
2016 (2)